Si Piezosensor for Angle Control of Piezoelectric MEMS Micromirror
Date:
Finite element analysis
| Research Assistant | Supervisor: Prof. Shuji Tanaka & Assist. Prof. Andrea Vergara |
• Acquired a comprehensive understanding of the principles associated with MEMS processing and have gained hands-on experience in the complete process, encompassing deposition, photolithography, etching, dicing, wire bonding, and packaging.
• Designed an effective angle sensor structure for the slow axis of a 2D piezoelectric micromirror utilizing Si piezoresistors, resulting in enhanced feedback control sensitivity.
• Manufactured prototype testing devices (including cantilever and meandering structures) on a Silicon-on-Insulator (SOI) wafer equipped with integrated Si piezoresistors by employing doped wiring techniques.
• Conducted output characterization and performed a comparative analysis with simulation and calculation results.